Fabrication of a Biomimetic Corrugated Polysilicon Diaphragm with Attached Single Crystal Silicon Proof Masses [chapter]

Kyutae Yoo, J.-L. A. Yeh, N. C. Tien, C. Gibbons, Q. Su, W. Cui, R. N. Miles
2001 Transducers '01 Eurosensors XV  
This paper reports a new approach to the fabrication of 3D structured diaphragms using integrated surface and deep reactive ion etching (DRIE) bulk silicon micromachining on a silicon-on-insulator (SOI) wafer. The fabrication process has been applied to a 1 mm × 2 mm × 1.2 µm diaphragm designed for a biomimetic directional microphone. The membrane has two 200 µm × 380 µm × 20 µm silicon proof masses, solid stiffeners, and a 20 µm deep corrugation. Acoustic measurements of the diaphragm using
more » ... diaphragm using laser vibrometry have demonstrated high directional sensitivity of the device.
doi:10.1007/978-3-642-59497-7_30 fatcat:ejrecx2jinenfpytybolmt3lyu