This paper presents a novel methodology for position and orientation (pose) measurement of stages used for micro/nano positioning which produce coupled motions with three planar degrees of freedom (DOF). In the proposed methodology, counter-rotation of the entire mechanism prevents the misalignment of the measurement beams within a laser-interferometry-based sensing and measurement technique. To detect such misalignment, a sensing strategy constructed around a position sensitive diode has been

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... eveloped. A feedforward-feedback compound controller has been established to provide the necessary counter-rotation input to reduce misalignment error. Experimental validation has been conducted through measurement of the workspace of a three DOF planar micro/nano positioning stage. Experimental results demonstrate the capability of the technique to provide combined linear/angular measurement.