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Angle-resolved light scattering has been used for decades to quantify the surface roughness of optical components. However, because this technique is affected by the contribution of both interfaces of the sample, it cannot be applied to transparent substrates. We show how to overcome this issue and apply these principles to the characterization of superpolished samples. The roughness spectrum ␥͑, ͒ of the surface is M. Zerrad (email@example.com), C. Deumié, M. Lequime, and C. Amra are withdoi:10.1364/ao.45.001402 pmid:16539243 fatcat:jpbr72g6dfdbhf2f25fosyggde