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Preparation and characterization DLC thin films using atmospheric pressure plasma Jet
2018
IOP Conference Series: Materials Science and Engineering
Diamond-like carbon, amorphous hydrogenated films forms of carbon, were pretreated from cyclohexane (C 6 H 12 ) liquid using plasma jet which operates with alternating voltage 7.5kv and frequency 28kHz. The plasma Separates molecules of cyclohexane and Transform it into carbon nanoparticles. The effect of argon flow rate (0.5, 1 and 1.5 L/min) on the optical and chemical bonding properties of the films were investigated. These films were characterized by UV-Visible spectrophotometer, X-ray
doi:10.1088/1757-899x/454/1/012065
fatcat:iqvgfvexnza7jikopwy2jxzwfu