Supplementary document for Fifth-order intrinsic aberration calculation method for soft X-ray and vacuum ultraviolet optical system - 5151780.pdf

Yiqing Cao, Zhijuan Shen
This supplemental document gives the relationship between the wave aberration coefficient expressions with aperture-ray coordinates on the reference exit wavefront and the ones on the optical surface.
doi:10.6084/m9.figshare.14248958.v1 fatcat:sncywcgkhngg7khrvsf22oh4uy