Enhancement of the Quality Factor of AlN Contour Mode Resonators by Acoustic Reflection: Numerical Design and Experimental Investigation

M. Cremonesi, A. Frangi, C. Cassella, G. Piazza
2014 Procedia Engineering  
doi:10.1016/j.proeng.2014.11.390 fatcat:km7mctpw3bg6fmiiwlfjqvk7um