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Contamination-resistant silica antireflective coating with closed ordered mesopores
2014
Physical Chemistry, Chemical Physics - PCCP
Preserved Fulltext
Silica antireflective coating with ordered mesopores closed by long chain fluoroalkylxane has high environmental stability.
doi:10.1039/c4cp01032a
pmid:25000419
fatcat:kljpdmkvzjhpxekkf2imtidn7m