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Ultrasonic Effects on the Properties of Copper Deposited Film
銅電析皮膜の性質におよぼす超音波照射の影響

Atsushi CHIBA, Wen-Chang WU, Kazumi NAKANISHI
1993 Journal of The Surface Finishing Society of Japan  

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doi:10.4139/sfj.44.631 fatcat:a5n6cjlbmrgyfkf3dd2bozsdqa
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Atsushi CHIBA, Wen-Chang WU, Kazumi NAKANISHI. "Ultrasonic Effects on the Properties of Copper Deposited Film." Journal of The Surface Finishing Society of Japan 44.7 (1993) 631-637