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Top-Mirror Migration for the Fabrication of High-QPlanar Microcavities Containing Fragile Active Materials
2013
Applied Physics Express
We propose a migration technique for the deposition of the top dielectric mirror in the fabrication of planar microcavities containing a fragile molecular active layer. Our goal is to preserve the active material during this deposition step. The technique is validated by the fabrication of a passive cavity, showing a quality factor similar to that achieved by a conventional monolithic approach. The migration technique is then used to fabricate a perovskite-based organic-inorganic microcavity
doi:10.7567/apex.6.106701
fatcat:sl2fmbdylrc4fk3i2n3j7qsdbe