Hydrogen-induced Dipoles and Sensing Principles of Pt-Ti-O Gate Si-MISFET Hydrogen Gas Sensors

Toshiyuki Usagawa, Kotaro Takeyasu, Katsuyuki Fukutani
2014 Procedia Engineering  
doi:10.1016/j.proeng.2014.11.333 fatcat:f54biqsdtfg7bn2j7bhnlf3oja