Importance of Study Device Nowadays, electronic products, such as computers, mobile phones, televisions, and so on, are necessary in our daily life. In these products, the semiconductor devices are commonly used. The function of semiconductors is developing because of down sizing to several nano-meters, and we need to control devices on the atomic level. One of the problems in device function is remarkable effects (the conductivity, stability and getting) of the defects and impurities. Thus,