Prevention of Oil Vapor Backsteaming in Vacuum System by Gas Purge Method
粗引真空過程における油の逆流防止について (第2報)

Yoshitsugu TSUTSUMI, Shinjiro UEDA, Masato IKEGAWA, Jun'ichi KOBAYASHI
1994 Shinku  
doi:10.3131/jvsj.37.155 fatcat:tf25dtgykngwrdcauaxjo5ikxe