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Synthesis of Periodic Mesoporous Silica Thin Films

M. T. Anderson, J. E. Martin, J. G. Odinek, P. Newcomer
1996 Materials Research Society Symposium Proceedings  

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We have synthesized periodic mesoporous silica thin films (PMSTF) from homogeneous solutions. To synthesize the films a thin layer of a pH = 7 micellar coating solution that contains TMOS is dip-or spin-coated onto silicon wafers, borosilicate glass, or quartz substrates. Ammonia gas is diffused into the solution and causes rapid hydrolysis and condensation of the TMOS and the formation of periodic mesoporous thin films within -10 seconds. The combination of homogeneous solutions and rapid
more » ... ct formation maximizes the concentration of desired product and provides a controlled, predictable microstructure. The films have been made continuous and crack-free by optimizing initial silica concentration and film thickness.
doi:10.1557/proc-431-217 fatcat:qsct7pcvxbbmbbwdxgresmizdm
Citation

M. T. Anderson, J. E. Martin, J. G. Odinek, P. Newcomer. "Synthesis of Periodic Mesoporous Silica Thin Films." Materials Research Society Symposium Proceedings (1996)