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Nano-silver doped silica films were deposited on glass slides using a sol-gel process and heat-treated at different temperatures. The films were characterized by ultraviolet-visible spectroscopy, x-ray photoelectron spectroscopy ͑XPS͒, atomic force microscopy ͑AFM͒, Rutherford backscattering spectrometry ͑RBS͒, and transmission electron microscopy for their optical, chemical, and structural properties. The absorption peak of silver colloids ͑wavelength from 400 to 460 nm͒ was present and adoi:10.1063/1.1571215 fatcat:uxzhlhg4tzcebeydekhbzqvoaq