Effects of low-temperature annealing phosphorous gettering process on the electrical properties of multi-crystalline silicon with a low minority carrier lifetime

Jiang Li-Li, Lu Zhong-Lin, Zhang Feng-Ming, Lu Xiong
2013 Wuli xuebao  
doi:10.7498/aps.62.110101 fatcat:2icytrykindhxjngpiy66ixlhe