EXPERIMENTAL STUDY AND NUMERICAL SIMULATION OF HYDRODYNAMICS AND HEAT TRANSFER IN A COLD-WALL CVD REACTOR

H. CHEHOUANI, B. ARMAS, C. COMBESCURE, S . BENET, S. BRUNET
1991 Journal de Physique IV : Proceedings  
Article published online by EDP Sciences and available at http://dx.
doi:10.1051/jp4:1991221 fatcat:jqcpdj47ffbthha7nbgof5keda