A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is application/pdf.
Deepu Roy, Ralf M. T. Pijper, Luuk F. Tiemeijer, Rob A. M. Wolters. "Contact resistance measurement structures for high frequencies." 2011 IEEE ICMTS International Conference on Microelectronic Test Structures (2011)