Contact resistance measurement structures for high frequencies

Deepu Roy, Ralf M. T. Pijper, Luuk F. Tiemeijer, Rob A. M. Wolters
2011 2011 IEEE ICMTS International Conference on Microelectronic Test Structures  
doi:10.1109/icmts.2011.5976859 fatcat:7342nq5debcularc5zutopk5my