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Identification of Background in CMA
2007
Journal of Surface Analysis
We studied the background in electron spectroscopy that was caused by the scattering of signal electrons in the specific cylindrical mirror analyzer (CMA) developed for absolute Auger electron spectroscopy. For this, a mini-electron gun was set at a sample position to calibrate the trajectories of signal electrons in the CMA. The electron beam current (i in ) entering the CMA was measured using a retractable Faraday cup and the detected current (i out ) was measured using another Faraday cup
doi:10.1384/jsa.14.95
fatcat:xqcawfog6jh2hijih7lxau3e4y