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An Electrothermally Actuated VO2-Based MEMS Using Self-Sensing Feedback Control
Journal of microelectromechanical systems
A self-sensing approach is used to accurately control the large displacements observed in VO 2 -based microelectromechanical systems actuators. The device is operated electrothermally using integrated resistive heaters. The coupling of the abrupt electrical and mechanical changes in VO 2 films across its phase transition allow for the estimation of the device's deflection by monitoring the film's resistance. Furthermore, the typical hysteretic behavior observed in VO 2 films is significantlydoi:10.1109/jmems.2014.2317944 fatcat:if4uk3r2xvei7hicib476dlpfy