INFLUENCE OF THE FABRICATION CONDITIONS ON THE p+-TaSi2/POLY-Si GATE QUALITY

C. MAZURE, U. SCHWALKE, F. NEPPL, P. EICHINGER, M. METZGER
1988 Le Journal de Physique Colloques  
doi:10.1051/jphyscol:1988485 fatcat:7cdna3jz2jeetl2csp2m3yl5m4