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Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor
2018
Micromachines
This paper presents an EMD (empirical mode decomposition)-based extraction approach to decouple the electric field fringe component impacts on the nonlinearity errors of a micro encoder-like capacitive displacement sensor. A calculated capacitance model built under Maxwell's equations against the impacts of electric field fringe component indicates that signals of this sensor are all in periodic co-sinusoidal waveforms. Applying the proposed EMD scheme, signals are decomposed into sets of
doi:10.3390/mi9050211
pmid:30424144
pmcid:PMC6187548
fatcat:p4bs5v3tzzczjhdecgbhplk2re