Ablation of organic polymers by 46.9-nm-laser radiation

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Präg, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham (+3 others)
2005 Applied Physics Letters  
We report results of the exposure of poly͑tetrafluoroethylene͒ -͑PTFE͒, poly͑methyl methacrylate͒ -͑PMMA͒, and polyimide -͑PI͒ to intense 46.9-nm-laser pulses of 1.2-ns-duration at fluences ranging from ϳ0.1 to ϳ10 J/cm 2 . The ablation rates were found to be similar for all three materials, ϳ80-90 nm/ pulse at 1 J / cm 2 . The results suggest that the ablation of organic polymers induced by intense extreme ultraviolet laser radiation differs from that corresponding to irradiation with longer wavelengths.
doi:10.1063/1.1854741 fatcat:4lurdrnlrng6pizyr7iza2bsga