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Electrical Equivalent Analysis Of Micro Cantilever Beams For Sensing Applications
2015
Zenodo
Microcantilevers are the basic MEMS devices, which can be used as sensors, actuators and electronics can be easily built into them. The detection principle of microcantilever sensors is based on the measurement of change in cantilever deflection or change in its resonance frequency. The objective of this work is to explore the analogies between mechanical and electrical equivalent of microcantilever beams. Normally scientists and engineers working in MEMS use expensive software like
doi:10.5281/zenodo.1110478
fatcat:ia6cidmyfff2zmib6whr7ofogi