Reliability studies of microoptical components in NEMO

F. Berghmans, M. Van Uffelen, S. Eve, E. Ernst, A. Last, D. Rabus, N. Huber, O. Kraft, A. Andrei, L. Nieradko, K. Krupa, M. Jozwik (+8 others)
2006 Reliability of Optical Fiber Components, Devices, Systems, and Networks III  
We discuss on-going reliability studies of micro-optical components and assemblies as conducted in the EU FP6 Network of Excellence on Micro-Optics "NEMO". We focus on three case studies including first biaxial fatigue testing of micro-optical components, second reliability testing and quality control of MEMS and third micro-interferometric tomography for measuring optical fibre refractive index changes. For each of these case studies we discuss the dedicated measurement and characterization
more » ... hods as well as first results and the perspectives for future research.
doi:10.1117/12.662001 fatcat:p3gmwmlw2jfodh6j7hyz3hfoa4