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This paper presents a vacuum-packaged resonant pressure sensor featured with high sensitivity and linearity using dual resonators. The frequency difference between these two resonators is used to represent pressure, so that the nonlinear responds of each resonator is eliminated and the sensitivity of the sensor is also improved at the same time. The sensitivities of the dual resonators were matched through improved diaphragm uniformity and controlled anchor undercut, which leaded to a betterdoi:10.1016/j.proeng.2015.08.609 fatcat:xttnuvfyzfb5zbod4ioq4l4axq