In this paper, an inertial transducer developed in bulk and etch silicon-on-insulator microelectromechanical-system technology is presented. The device is suitable for low-frequency observation and could represent an interesting solution to implement low-cost monitoring systems for applications requiring a large number of monitoring sites and disposable devices. In particular, the sensor design and the technology adopted are presented here along with models describing the device operation. In

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... dition, an experimental sensor prototype is proposed, and experimental results confirming the suitability of the proposed architecture and its consistence with the predicted behavior are discussed. Index Terms-Bulk and etch silicon-on-insulator (BE-SOI), inertial sensor, low cost, microelectromechanical system (MEMS), seismic measurements, volcanic monitoring.