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Relationship between modification of simulation model and relative sensitivity factor of B-A gauge
シミュレーションモデルの変形によるB-A真空計の比感度係数の変化

Shigemi Suginuma, Masahiro Hirata
2020 Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science  

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doi:10.14886/jvss.2020.0_96 fatcat:fn3jajgocrgwbbhvr5ngrayzqy
lang:ja
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Shigemi Suginuma, Masahiro Hirata. "Relationship between modification of simulation model and relative sensitivity factor of B-A gauge." Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2020.0 (2020) 96