High-precision optical measurement methods

Hans J. Tiziani, Christophe Gorecki, Richard W. T. Preater
1994 Optical Measurements and Sensors for the Process Industries  
I. INIRODllCTION Noncontact optical methods are appropriate for mic;ro.. and macrostructure measurements. Time of flight and phase measuring techniques with a resolution in the order of a few mm to one mm. respectively arc well introduced. Furthermore active and passive triangulation techniques arc very robust and appropriate for different applications in precision measurements. Some optical 3-D-measurement techniques are summarized together with their depth resolution in table I. Tiroe of
more » ... le I. Tiroe of flight and phase measuring techniques are well established. For the measurement of the topography the principle of triangulation as well as its extension to light sectioning and pmjected fringe methods can be applied succesfully (1-7). Triangulation based 3-D-sensor.; are appropriate tools for inspection and measurement in industrial environments. They fuIfiI very often the high requirements upon range, resolution and robustness. Synchronized single-spot-scanner.;, based on triangulation can be very versatile for industrial applications. interferometry together with video electronic processing lead to a sensitivity of 1/100 of a fringe at any
doi:10.1117/12.194305 fatcat:o4fey773arf2xlmgg2snwkf3ny