A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2016; you can also visit the original URL.
The file type is
The authors compare the effects of vacuum ultraviolet ͑VUV͒ irradiation on pristine and UV-cured low-k porous organosilicate glass ͑SiCOH͒. The authors find that during VUV irradiation, more trapped charges are generated in UV-cured SiCOH as compared to pristine SiCOH. VUV is also used as a tool to investigate effects of UV curing. From comparison of VUV spectroscopy and photoinjection current of the two samples, the authors find that UV curing reduces the number of defect states in SiCOH. Thedoi:10.1116/1.3570818 fatcat:rmyioooygvbjfbjvp7bue7ejuy