Effects of vacuum ultraviolet radiation on deposited and ultraviolet-cured low-k porous organosilicate glass

H. Sinha, G. A. Antonelli, G. Jiang, Y. Nishi, J. L. Shohet
2011 Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films  
The authors compare the effects of vacuum ultraviolet ͑VUV͒ irradiation on pristine and UV-cured low-k porous organosilicate glass ͑SiCOH͒. The authors find that during VUV irradiation, more trapped charges are generated in UV-cured SiCOH as compared to pristine SiCOH. VUV is also used as a tool to investigate effects of UV curing. From comparison of VUV spectroscopy and photoinjection current of the two samples, the authors find that UV curing reduces the number of defect states in SiCOH. The
more » ... uthors also find that UV-cured SiCOH has higher photoconductivity and intrinsic conductivity from VUV spectroscopy and trapped-charge decay rate, respectively.
doi:10.1116/1.3570818 fatcat:rmyioooygvbjfbjvp7bue7ejuy