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ErBa: Cu,O, , films have been produced by simultaneous deposition of Er, Ba, and Cu from three ionized cluster beam (ICB) sources at acceleration voltages of 0.3-0.5 kV. Combining ozone oxidation with ICB deposition at 650 °C eliminated any need of post anneal processing. The substates were rotated at 10 rotations per minute during the deposition which too!: place at a rate _ffabout 3 to 4 am. ErBa: Cu_ O:. , films with areas up to 70 mm in diameter have been made by ICB depositi_m These film_.doi:10.1116/1.577422 fatcat:otk5yj7ygjbqrcqmqtpzkjmkci