Rapid X-ray Fabrication of Microstructured Polytetrafluoroethylene Substrates by Anisotropic, Pyrochemical Microetching

Akinobu Yamaguchi, Hideki Kido, Yuichi Utsumi
2016 Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi)  
We investigate the anisotropic, pyrochemical microetching of poly(tetrafluoroethylene) (PTFE) using X-ray-induced decomposition and scission initiated by synchrotron radiation. The dependence of the anisotropic, pyrochemical-etching characteristics on X-ray photon energy is investigated by comparing the etching depths produced by two beam lines with different X-ray photon energies. Higher X-rays penetrate deeper into the PTFE substrate, resulting deeper etching depth than that by low-energy
more » ... ys. The anisotropic, pyrochemical-etching process sheds light on the fabrication of microfluidic devices and Lab-on-a-Chip made from high-precision PTFE microstructures.
doi:10.2494/photopolymer.29.403 fatcat:dnjkld4tzzc2rn4x3yskfebhve