Anode double layer in magnetized radio frequency inductively coupled hydrogen plasma

Deli Tang, Paul K. Chu
2003 Journal of Applied Physics  
The formation of the double layer created around the anode in magnetized radio frequency inductively coupled plasma, which is visually apparent because of enhanced light emission from the neutrals excited by energetic electrons, is investigated in detail in this work. The effects of the external magnetic field and anode voltage on the evolution of a cylindrical luminous anode double layer from the anode glow are evaluated in magnetized hydrogen plasmas. The anode glow is initially produced by
more » ... e additional dc discharge which forms when a cylindrical anode inserted into the plasma diffusion region is positively biased. If the anode voltage is sufficiently high, the anode glow is transformed into an elongated luminous anode double layer in the plasma diffusion region, to which a diverging magnetic field generated by external magnetic coils is coupled. A weakly magnetized plasma is needed for the formation of the anode double layer in our experiments, and there is a magnetic field strength ceiling beyond which the anode double layer disappears. The dependence of the anode double layer structure on the magnetic field strength, anode voltage and the neutral gas pressure is also investigated.
doi:10.1063/1.1589592 fatcat:jc2ttqx7xzak5bz7xfpdexlswy