IC-processed electrostatic micro-motors

Long-Sheng Fan, Yu-Chong Tai, R.S. Muller
Technical Digest., International Electron Devices Meeting  
We describe the design, fabrication, and operation of several micro-motors that have been produced using integrated-circuit processing [3). Both rotors and stators for these motors, which are driven by electrostatic forces, are formed from 1.0-1.5 µm-thick polycrystalline silicon. The diameters of the rotors in the motors we have tested are between 60 and 120 µm. Motors with several friction-reducing designs have been fabricated using phosphosilicate glass (PSG) as a sacrificial material [ 4,5)
more » ... ial material [ 4,5) and either one, or three polysilicon depositions. INTRODt:CTION Recent publications have discussed possible designs for micro-motors [1,2) based on electrostatic-drive principles. Using technology derived from IC manufacturing processes, we have built and tested several electrostatically driven rotating motors and driven them both in stepwise fashion and through continuous revolutions. Included among the motors are structures with 4 and 8 rotor poles and 6, 12, and 24 stator poles. Typical gaps between the rotors and stators in this first realization of operating micromotors are 2 µm or greater. The technology for the motors, which have rotors that tum on stationary axles fixed to the silicon substrate, is based upon the processes described in [ 4, 5) .
doi:10.1109/iedm.1988.32901 fatcat:4vbgckcf2navpc7atisvxvj5wu