Fractality aspects during agglomeration of solid-phase-epitaxy Co–silicide thin films

G. Palasantzas, J. Th. M. De Hosson
2000 Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena  
doi:10.1116/1.1312262 fatcat:74k7mgx27zff3hfumeqrn3fbwe