In-plane linear displacement bistable microrelay

Troy Gomm, Larry L Howell, Richard H Selfridge
2002 Journal of Micromechanics and Microengineering  
This paper investigates the Linear Displacement Bistable Mechanism (LDBM) for use in microrelays. The LDBM, thermal actuators, and contacts are integrated to demonstrate a relay design. The performance of the relay is characterized using relay performance metrics, including size (1.92 mm 2 ), contact force (23.4 µN), switching time (340 µs), breakdown voltage (> 475 V), and isolation (> 235 V). The actuation voltage and current are 11 V and 85 mA, respectively. AC characteristics, including
more » ... tics, including contact-to-contact crosstalk and AC isolation are also measured. The testing results demonstrate that it is feasible to use the LDBM as a microrelay and that it has potential for use in future applications.
doi:10.1088/0960-1317/12/3/310 fatcat:374yp6o6u5axjlbxib4i3djzra