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Control of two basic ionization processes in dielectrics i.e. photo ionization and electron-electron impact ionization on intrinsic time and intensity scales is investigated experimentally. In our experiment, we use a modified microscope set up to irradiate the surface of a fused silica sample with a single shaped pulse resulting in nanoscale ablation structures. The topology of the laser generated structures is measured by Atomic Force Microscopy (AFM). Structure parameters are investigated asdoi:10.1063/1.3507114 fatcat:v7ghndwk2rgghdpfnfibsqavnu