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Surface grating-like ablation with microscopic period (Λ~1-5 µm) is achieved at the surface of polymers with the aid of the KrF laser patterned with a mask projection technique using a precision imaging lens. The ablated patterns can be controlled with a submicron accuracy in most cases on smooth polymer surfaces. Prediction of these patterns can furthermore be made with the aid of theoretical models combining ablation curves, intensity profiles and hydrodynamic flow. We further demonstratedoi:10.1117/12.596312 fatcat:qrp5utvhqndbbp2hakcreilyxm