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Fabrication error analysis and experimental demonstration for computer-generated holograms

Ping Zhou, James H. Burge
2007 Applied Optics  
Aspheric optical surfaces are often tested using computer-generated holograms (CGHs). For precise measurement, the wavefront errors caused by the CGH must be known and characterized. A parametric model relating the wavefront errors to the CGH fabrication errors is introduced. Methods are discussed for measuring the fabrication errors in the CGH substrate, duty cycle, etching depth, and effect of surface roughness. An example analysis of the wavefront errors from fabrication nonuniformities for
more » ... onuniformities for a phase CGH is given. The calibration of these effects for a CGH null corrector is demonstrated to cause measurement error less than 1 nm.
doi:10.1364/ao.46.000657 pmid:17279150 fatcat:fvpzzhmysngdraf6hxknxzqcba