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Operating conditions of a particle analyzer using inductively coupled plasma mass spectrometry were investigated to optimize the analysis of individual aerosol particles for zinc in the picogram to femtogram range. The signal intensities and their fluctuations from individual particles were strongly affected by the carrier gas flow rate, radio frequency power and sampling depth. The optimum operating conditions were determined and are discussed based on the vaporization and ionization processesdoi:10.2116/analsci.11.835 fatcat:m53nv24225dnvibr6gi6xl56fe