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Free-standing polycrystalline silicon (Si) based photonic crystal (PhC) membranes with etched circular and square holes are developed to display high reflectivity in the mid-infrared (MIR) region. Greater than 90% reflection was measured in the MIR wavelengths around 3.58 μm. By using square air holes in the PhC membrane, the mechanical strength of the polycrystalline Si membrane can be enhanced as square air holes have a lower filling factor of 36% of air holes, compared to 49% in circular airdoi:10.1109/jstqe.2013.2294463 fatcat:qnow6ncdqrfk3fq3ewkojda6ku