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Effects of pulsed laser ablation (PLA) plasma on sterilization were studied using a thin film deposition system. Yeast fungus and spore-forming bacteria were used as the subjects of sterilization, and Ag bulk was used as the PLA target in this experiment. Experimental results suggest that both yeast fungus and spore-forming bacteria can be sterilized using PLA plasma irradiation. The effectiveness of the sterilization strongly depended on the laser fluence and irradiation time. From the opticaldoi:10.14723/tmrsj.40.145 fatcat:twcqzht4lrcnjlcdhyndwurfcu