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A Ni-Zn ferrite-enhanced U-shaped internal inductive antenna (240 mm × 2300 mm) operated at 2 MHz was used as a linear plasma source for an ultralarge-area plasma, and its plasma and electrical characteristics were investigated and compared with those of the antenna operated at 13.56 MHz without the ferrite. By the magnetic field enhancement, the operation of the source showed higher power transfer efficiency, lower antenna impedance, and lower RF rms voltage compared to that operated at 13.56doi:10.1109/tps.2009.2037966 fatcat:o776r4j4ofa3ncfhbnss47v2um