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In this article, we presented the indium tin oxide (ITO) and aluminum zinc oxide (AZO) thin film as the new transparent conductive oxide (TCO) coating on the flexible and transparent polydimethylsiloxane (PDMS) substrate by RF sputtering. The elastomer PDMS can stand much higher temperature up to 200°C. The PDMS has an advantage over the other commercially used polymers such as PET, PEN in electronic devices due to its high temperature resistance. In this article, we have discussed thedoi:10.5796/electrochemistry.81.896 fatcat:5lofeyip55d7nopljhhcuvbdem