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The refractive index n ϭ 1 Ϫ ␦ ϩ i␤ of Si in the energy range 50 -180 eV is investigated with angledependent reflectance measurements. The optical constants ␦ and ␤ are both determined by fitting to the Fresnel equations. The results of this method are compared with the values in the atomic tables derived from experimental data for ␤ and implementation of the Kramers-Kronig relations for ␦. The samples were prepared by UV irradiation and HF:ethanol dipping to H passivate the surface. It isdoi:10.1364/ao.36.005499 pmid:18259372 fatcat:t2fvhbp6craqjcj7dtasfgu2kq