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SUBMICRON SECONDARY ION MASS SPECTROMETER FOR THREE-DIMENSIONAL ANALYSIS OF MICROSTRUCTURE

YOSHIMASA NIHEI, HITOMI SATOH, BUNBUNOSHIN TOMIYASU, MASANORI OWARI
1991 Analytical Sciences  
doi:10.2116/analsci.7.supple_527 fatcat:spxex2ghgvfvncbdua7gcsdcmy