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Si-CMOS compatible materials and devices for mid-IR microphotonics

Pao Tai Lin, Vivek Singh, Jianfei Wang, Hongtao Lin, Juejun Hu, Kathleen Richardson, J. David Musgraves, Igor Luzinov, Joel Hensley, Lionel C. Kimerling, Anu Agarwal
2013 Optical Materials Express  
CMOS compatible mid-Infrared (mid-IR) microphotonics including (1) broadband SOUP (Silicon on Oxide Undercladding Pedestal) waveguides; and (2) mid-IR transparent chalcogenide glass (ChGs) waveguides monolithically integrated with a PbTe thin film photodetector; are demonstrated. Using a pedestal undercladding geometry we obtain an optical loss for our Si waveguide which is 10 dB/cm lower compared to other waveguides using planar SiO 2 cladding at λ = 5 µm, and a fundamental mode is seen over a
more » ... mode is seen over a broad mid-IR spectral range. To realize a fully integrated mid-IR on-chip system, in parallel, we develop PbTe thin film detectors that can be deposited on various mid-IR platforms through a thermal evaporation technique, offering high photoresponsivity of 25 V/W from λ = 1 µm to 4 µm. The detector can be efficiently integrated, using a suitable spacer, to an underlying Chalcogenide glass (ChGs) waveguide. Our results of low loss waveguides and integrated thin film detectors enable Si-CMOS microphotonics for mid-IR applications.
doi:10.1364/ome.3.001474 fatcat:g53oqnc6drhqjiusn4i6vwssae