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Compositionally asymmetric tri-color superlattices (TCS) with a combination of BaTiO 3 /SrTiO 3 /CaTiO 3 have been grown by pulsed laser deposition (PLD) on atomically-flat SrRuO 3 -covered (001) SrTiO 3 substrates. Conducting SrRuO 3 films with single-terrace steps that closely mimic those of the SrTiO 3 substrate also were grown by PLD and serve as bottom electrodes. In order to achieve atomic control of each layer, we have calibrated precisely the number of laser pulses required to grow onedoi:10.1557/proc-784-c3.24 fatcat:ntanutuppzbvbhla7a7iwk76nm