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Compositionally Asymmetric Tri-Color Superlattices Grown by Pulsed Laser Deposition

H. N. Lee, H. M. Christen, C. M. Rouleau, S. Senz, S. K. Lee, D. Hesse, D. H. Lowndes
2003 Materials Research Society Symposium Proceedings  
Compositionally asymmetric tri-color superlattices (TCS) with a combination of BaTiO 3 /SrTiO 3 /CaTiO 3 have been grown by pulsed laser deposition (PLD) on atomically-flat SrRuO 3 -covered (001) SrTiO 3 substrates. Conducting SrRuO 3 films with single-terrace steps that closely mimic those of the SrTiO 3 substrate also were grown by PLD and serve as bottom electrodes. In order to achieve atomic control of each layer, we have calibrated precisely the number of laser pulses required to grow one
more » ... quired to grow one unit-cell-thick layers (~200 for a laser spot of 0.4 mm 2 ). These conditions allowed recording of pronounced oscillations of the reflection highenergy electron diffraction (RHEED) specular spot intensity over the entire growth run -even for TCS layers totaling more than 1000 nm in total thickness.
doi:10.1557/proc-784-c3.24 fatcat:ntanutuppzbvbhla7a7iwk76nm