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Visual servoing schemes for automatic nanopositioning under scanning electron microscope

Naresh Marturi, Brahim Tamadazte, Sounkalo Dembele, Nadine Piat
2014 2014 IEEE International Conference on Robotics and Automation (ICRA)  
This paper presents two visual servoing approaches for nanopositioning in a scanning electron microscope (SEM).  ...  The first approach uses the total pixel intensities of an image as visual measurements for designing the control law.  ...  VISUAL SERVOING FOR NANOPOSITIONING Considering the problem of using feature tracking for visual servoing in a SEM, in this section we develop two visual servoing methods for nanopositioning.  ... 
doi:10.1109/icra.2014.6906973 dblp:conf/icra/MarturiTDP14 fatcat:tu5kb57a5vg3rmm4xktt6ejmj4

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Chaoyang Shi, Devin K Luu, Qinmin Yang, Jun Liu, Jun Chen, Changhai Ru, Shaorong Xie, Jun Luo, Ji Ge, Yu Sun
2016 Microsystems & Nanoengineering  
A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside  ...  The limitations of the existing technologies and prospects for new technologies are also discussed.  ...  SEM-based visual servoing; strain gauges for position-sensing 100 nm 16% Not reported 37 Abbreviations: AFM, atomic force microscope; FIB, focused ion beam; SEM, scanning electron microscope  ... 
doi:10.1038/micronano.2016.24 pmid:31057824 pmcid:PMC6444728 fatcat:d3bulo27lfhcfd25hggh3lqifi

Guest Editorial Introduction to the Focused Section on Optomechatronics

Farrokh Janabi-Sharifi, Hyungsuck Cho, Toshio Fukuda
2010 IEEE/ASME transactions on mechatronics  
Automated handling is also of great interest under nanospace. In 2007, Fatikow et al. [5] reported the development of an automated nanohandling station within scanning electron microscope (SEM).  ...  Automated handling of transmission electron microscope lamellae was demonstrated to verify the system's automatic nanohandling capability.  ... 
doi:10.1109/tmech.2010.2052283 fatcat:s7ybg67rm5afbci67jcrotj7iy

2020 Index IEEE/ASME Transactions on Mechatronics Vol. 25

2020 IEEE/ASME transactions on mechatronics  
., Framework for Static and Dynamic Friction Identification for Industrial Manipulators; TMECH June 2020 1589-1599 Inyang-Udoh, U., Guo, Y., Peters, J., Oomen, T., and Mishra, S., Layer-to-Layer Predictive  ...  Control of Inkjet 3-D Printing; TMECH Aug. 2020 1783-1793 Iordachita, I., see He, C., TMECH Dec. 2020 2846-2857 Iqbal, A., Gao, Y., and Gu, Y., Provably Stabilizing Controllers for Quadrupedal Robot  ...  ., +, TMECH Oct. 2020 2287-2296 Attitude-Constrained Time-Optimal Trajectory Planning for Rotorcrafts: Theory and Application to Visual Servoing.  ... 
doi:10.1109/tmech.2021.3049586 fatcat:k4ngjuvq7jc6pgfoh6irwtkvfi

A review of computer micro-vision-based precision motion measurement: principles, characteristics and applications

Sheng Yao, Hai Li, Shuiquan Pang, Benliang Zhu, Xianmin Zhang, Sergej Fatikow
2021 IEEE Transactions on Instrumentation and Measurement  
Unlike other measurement methods, the vision-based techniques can intuitively visualize the measuring process with high interactivity, expansibility, and flexibility.  ...  As an effective and powerful tool for automation and manipulation at small scales, precision motion measurement by computer microvision is now broadly accepted and widely used in microengineering/nanoengineering  ...  Panel adapted from [122] with the permission from IEEE. presented an automatic 3-D nanopositioning scheme for piezoelectric nanopositioners with an accuracy up to 0.04 μm.  ... 
doi:10.1109/tim.2021.3065436 fatcat:nyqncgluvbfjbhx4ib3pmr6oba

2018 Index IEEE/ASME Transactions on Mechatronics Vol. 23

2018 IEEE/ASME transactions on mechatronics  
., +, TMECH Feb. 2018 160-166 Visual Tracking of Six-Axis Motion Rendering Ultraprecise Visual Servoing of Microscopic Objects.  ...  ., +, TMECH April 2018 586-595 Visual Tracking of Six-Axis Motion Rendering Ultraprecise Visual Servoing of Microscopic Objects.  ...  1981 -1992 Improved NO and NO2 Concentration Estimation for a Diesel-Engine-Aftertreatment System. Zhang, H., +, TMECH Feb. 2018 190-199  ... 
doi:10.1109/tmech.2019.2893551 fatcat:ds4rb6mpw5bnbbbrdn25n3oh6m

2019-2020 Index IEEE Transactions on Industrial Electronics Vol. 67

2020 IEEE transactions on industrial electronics (1982. Print)  
., Novel Topologies of Power Electronics Converter as Active Magnetic Bearing Drive; TIE Feb. 2020 950-959 Jiang, D., see Chen, J., TIE Aug. 2020 6215-6226 Jiang, F., Pourpanah, F., and Hao, Q., Design  ...  Implementation, and Evaluation of a Neural-Network-Based Quadcopter UAV System; TIE March 2020 2076-2085 Jiang, J., Mohagheghi, A., and Moallem, M., Energy-Efficient Supplemental LED Lighting Control for  ...  ., +, TIE May 2020 3879-3890 A Novel Geometric Hierarchical Approach for Dynamic Visual Servoing of Quadrotors.  ... 
doi:10.1109/tie.2020.3045338 fatcat:gljm7ngg3fakvmnfswcbb5vwiu

Remotely Powered Propulsion of Helical Nanobelts [chapter]

Gilgueng Hwang, Stéphane Régnier
2016 Encyclopedia of Nanotechnology  
Highly miniaturized robots, often referred to as microrobots, are able to operate in constricted work spaces, for example, under a light microscope or in the vacuum chamber of a scanning electron microscope  ...  For this reason, the vacuum chamber of a scanning electron microscope is, for many applications, the best place for a nanohandling robot.  ... 
doi:10.1007/978-94-017-9780-1_204 fatcat:6mgkahuskvex3lg42y2iexjusa

Refractometric Sensing Using Plasmonic Nanoparticles [chapter]

Erik Martinsson, Daniel Aili
2016 Encyclopedia of Nanotechnology  
Highly miniaturized robots, often referred to as microrobots, are able to operate in constricted work spaces, for example, under a light microscope or in the vacuum chamber of a scanning electron microscope  ...  For this reason, the vacuum chamber of a scanning electron microscope is, for many applications, the best place for a nanohandling robot.  ... 
doi:10.1007/978-94-017-9780-1_100984 fatcat:mfkokslav5fddendtnn2mjcuoy

2020 Index IEEE Transactions on Instrumentation and Measurement Vol. 69

2020 IEEE Transactions on Instrumentation and Measurement  
Converter Using All-Digital Nested Delay-Locked Loops With 50-ps Resolution and High Throughput for LiDAR TIM Nov. 2020 9262-9271 Helsen, J., see Huchel, L., TIM July 2020 4145-4153 Hemavathi, N.,  ...  of Rounds; TIM June 2020 3739-3749 Hendeby, G., see Kasebzadeh, P., TIM Aug. 2020 5862-5874 Heng, Y., see Xue, M., TIM June 2020 3812-3817 Henry, M.P., The Prism: Recursive FIR Signal Processing for  ...  ., +, TIM Oct. 2020 7813-7824 An Automatic Visual Monitoring System for Expansion Displacement of Switch Rail.  ... 
doi:10.1109/tim.2020.3042348 fatcat:a5f4fsqs45fbbetre6zwsg3dly

2020 Index IEEE Robotics and Automation Letters Vol. 5

2020 IEEE Robotics and Automation Letters  
Vanneste, F., +, LRA April 2020 2380-2386 Automatic Shape Control of Deformable Wires Based on Model-Free Visual Servoing.  ...  Ma, H., +, LRA July 2020 4164-4171 Jacobian matrices Automatic Shape Control of Deformable Wires Based on Model-Free Visual Servoing.  ... 
doi:10.1109/lra.2020.3032821 fatcat:qrnouccm7jb47ipq6w3erf3cja

Parameter Adaptive [chapter]

2014 CIRP Encyclopedia of Production Engineering  
Machine Tool Technologies Research Foundation and Mori Seiki, Sandvik Coromant, Toolex, and Nikken companies are also acknowledged for their kind supports to the research.  ...  the manual positioning of conventional atomic force microscope (AFM) tips integrated in large-chamber SEM (scanning electron microscope).  ...  IEEE Trans Mechatron 13(1):147-151 Fahlbusch S, Mazerolle S, Breguet JM, Steinecker A, Agnus J, Pérez R, Michler J (2005) Nanomanipulation in a scanning electron microscope.  ... 
doi:10.1007/978-3-642-20617-7_100339 fatcat:ge4mgx5n3bbuzhdbikiodk2eqi

Optical Technology and Measurement for Industrial Applications Conference

Takeshi Hatsuzawa, Rainer Tutsch, Toru Yoshizawa
2019 Optical Technology and Measurement for Industrial Applications Conference  
Acknowledgement The author would like to the Rice Department of Thailand for providing funding of this project and supplying rice seed samples, and National Electronics and Computer Technology Center (  ...  NECTEC) for supplying equipment and facilities.  ...  The EOM is needed for controlling the effective laser cavity length at a large servo bandwidth.  ... 
doi:10.1117/12.2535570 fatcat:dk25lgagmrgsff2km52mnd7z7i

Conceptual design and multidisciplinary optimization of in-plane morphing wing structures

Daisaku Inoyama, Brian P. Sanders, James J. Joo, Douglas K. Lindner
2006 Smart Structures and Materials 2006: Modeling, Signal Processing, and Control  
Compared with an equivalent single layer theory, the prediction is more accurate for all degrees of freedom especially for thick plates.  ...  for increasing the performance of piezoelectric elements is clearly shown.  ...  material surfaces using Scanning Tunneling Microscopes (STM) and Atomic Force Microscopes (AFM).  ... 
doi:10.1117/12.658686 fatcat:rqnvt2atkjgnvpog5pivwjejzm

New Developments in Science and Technology - 60th Anniversary Special Issue, Beihang University (BUAA)

2012 Science  
provides cutting-edge research and education in advanced structural and functional materials, nanomaterials, new materials for clean energy, polymers and composites, nonequilibrium fabrication, corrosion  ...  (C) Effect on lastic modulus of PLGA scaffolds under tensile load. (D) Scanning electron microscope (SEM) images of the morphology of PLGA scaffolds under tensile load.  ...  Left: The scanning electron microscope (SEM) image of Ni bowls and the polarized optical microscopy images of LCs doped with 0.01 wt % Ni bowls in bright field; Right: The planar alignment mechanism of  ... 
doi:10.1126/science.338.6104.274-c fatcat:iurk5neuwvh2jgbohwevb5dicy
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