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A torsional MEMS varactor with wide dynamic range and low actuation voltage

C. Venkatesh, Shashidhar Pati, Navakanta Bhat, Rudra Pratap
2005 Sensors and Actuators A-Physical  
A MEMS varactor using torsional beams for actuation is proposed. Analytical expression for electrostatic torque developed is derived.  ...  The structure is compared with existing structures for dynamic range and actuation voltage.  ...  This work was carried out at National MEMS design Centre funded by NPSM.  ... 
doi:10.1016/j.sna.2005.03.003 fatcat:roj6v2apezecterfqwu7fxpcbi

Angular Vertical Comb-Driven Tunable Capacitor With High-Tuning Capabilities

H.D. Nguyen, D. Hah, P.R. Patterson, R. Chao, W. Piyawattanametha, E.K. Lau, M.C. Wu
2004 Journal of microelectromechanical systems  
This paper reports on a novel tunable capacitor with electrostatic angular vertical comb-drive (AVC) actuators.  ...  The largest tuning varactor demonstrates capacitance values between 0.27-8.6 pF-a tuning ratio of more than 31 : 1, the highest ever reported.  ...  Comb drive actuators have made it possible to achieve a tuning ratio from 8.4 to 1 with low operating voltages.  ... 
doi:10.1109/jmems.2004.828741 fatcat:fge6oiiisregvhv3kpu3ghrihe

Adjustable Resonance Frequency of RF-MEMS Capacitor by Using Comb- Drive Actuators: A Design Approaches

Agus Santoso Tamsir, Sandy Tannu Wijaya, Dato' Burhanuddin Yeop Majlis
2014 Makara Journal of Technology  
In this paper we proposed an adjustable resonance RF-MEMS varactor by using comb-drive actuators placing in each side of the square movable plate.  ...  The needs of smaller size RF varactor is a must today, and MEMS comes to be the potential one.  ...  Introduction An RF-MEMS variable capacitor (varactor) has replaced a conventional one due to very small size, high-quality of large tunability range, and low tuning voltage spans.  ... 
doi:10.7454/mst.v18i2.395 fatcat:tll7yzof6fbglfey3g6ta6o4yu

Adjustable Resonance Frequency of RF-MEMS Capacitor by Using Comb- Drive Actuators: A Design Approaches

Agus Santoso Tamsir, Sandy Tannu Wijaya, Dato' Burhanuddin Yeop Majlis
2014 Makara Journal of Technology  
In this paper we proposed an adjustable resonance RF-MEMS varactor by using comb-drive actuators placing in each side of the square movable plate.  ...  The needs of smaller size RF varactor is a must today, and MEMS comes to be the potential one.  ...  Introduction An RF-MEMS variable capacitor (varactor) has replaced a conventional one due to very small size, high-quality of large tunability range, and low tuning voltage spans.  ... 
doi:10.7454/mst.v18i2.2942 fatcat:pmviwbvgergr7ejtv2hmj5b2ee

Millimeter-wave phase shifter based on waveguide-mounted RF-MEMS

Dimitra Psychogiou, Yunjia Li, Jan Hesselbarth, Stephane Kühne, Dimitrios Peroulis, Christofer Hierold, Christian Hafner
2013 Microwave and optical technology letters (Print)  
To achieve the high static deflection angle between 0 and 7.5 (g: 0-168 lm, h: 200-32 lm) with a low DC actuation voltage (<27.5 V), a soft SU8 polymer spring has been integrated underneath each torsional  ...  RF-MEMS CHIP For the RF-MEMS chip design, a tilting micromirror approach is followed (Fig. 3) . It is based on electrostatic actuation and features a torsional out-of-plane-modus of movement.  ... 
doi:10.1002/mop.27390 fatcat:xjnu763sffhrxhi3yg7vb3p7cy

Reconfigurable Antennas: the State of the Art

Yevhen Yashchyshyn
2010 International Journal of Electronics and Telecommunications  
The main disadvantage of electrostatic actuation-based RF MEMS devices is that these devices exhibit pull-in instability above the pull-down voltage.  ...  Electronic Reconfiguration The electronic way of changing antenna's parameters is most frequently utilized, e.g., by varactors. Varactor impedance is controlled by electrical voltage.  ... 
doi:10.2478/v10177-010-0042-z fatcat:potaapv7qneuxd2owoct4x7oai

RF MEMS from a device perspective

J Jason Yao
2000 Journal of Micromechanics and Microengineering  
The challenges and statuses of these RF MEMS devices are outlined and discussed.  ...  The intent of this topical review is to provide perspective to newcomers in the field, and empower potential end-users with an overall device picture, current status, and a vision of their ultimate performance  ...  Acknowledgments Thanks are due to the members of the RSC clean room support staff in the area of micromachining and the various MEMS processing technology developments.  ... 
doi:10.1088/0960-1317/10/4/201 fatcat:zbuflzaj35bsrhv45ckynms7ze

Characteristic Features of RF MEMS Switches and its Various Applications

B. Mishra, Z. C. Alex
2009 Sensors & Transducers  
The paper presents the RF MEMS Switches, their development technology & its applications. The characteristics of RF MEMS Switches are reviewed and salient features are illustrated.  ...  Electromagnetic & thermoelastic actuator methods require high power consumption for actuation (few mw per device) and are incompatible with modern low power RF circuit.  ...  Miniaturized high frequency circuits with high system integration & low cost for personal use became only possible with the advent of the RF-MEMS technology, which is using MEMS technology to fabricate  ... 
doaj:5a44979f9cb24474b722d11c28643d98 fatcat:udexu7nmhrhp3d5gaq4ppqc5me

MEMS for high-frequency applications

Jung-Chih Chiao, Vijay K. Varadan
2001 Smart Structures and Materials 2001: Smart Electronics and MEMS  
For the planar transceivers, the interest is in demonstration of RF MEMS devices with a focus on integration issues including architectures and fabrication.  ...  In this paper, we reviewed some of the microelectromechanical system (MEMS) research efforts for high frequency applications.  ...  The breakdown voltages of the MEMS variable capacitors should be much higher than diode varactors.  ... 
doi:10.1117/12.436599 fatcat:hwt5xuw4a5hhvpnmj72y2svvfa

Bifurcation analysis of torsional micromirror actuated by electrostatic forces [article]

Meysam T. Chorsi, Hamed Mobki
2018 arXiv   pre-print
The micro actuator is composed of a micro mirror and two torsional beams, which are excited with two electrodes.  ...  The static governing equation of the torsional micro actuator is derived and the relation between rotation angle and the driving voltage is determined.  ...  Introduction Torsional micro actuator devices have broad applications in the micro electro mechanical systems (MEMS), such as torsional radio frequency (RF) switches, tunable torsional capacitors, Digital  ... 
arXiv:1611.06247v2 fatcat:g7sn4lvjojggxm4d2ryzbbc4im

Robust Design of RF MEMS Switch Design with Reduced Buckeling Effect

Anil KumarChaurasia, Rajesh Mehra
2015 International Journal of Computer Applications  
In the case of micro machined antennas, which usually have low voltage signals, RF MEMS switches with low actuation voltage are highly required for achieving reconfigurability.  ...  The actuation voltage of RF MEMS switches mainly depends on the spring constant of the switch membrane. A low actuation voltage capacitive shunt switch, is presented.  ...  The capacitive RF MEMS switches used along with CPW and integrated with RF circuits to achieve reconfigurability requires low actuation voltages [19] [20] [21] [22] .  ... 
doi:10.5120/21381-4376 fatcat:ypsodp3nxjd5zeko3tbdyf3hwi

Review of radio frequency microelectromechanical systems technology

S. Lucyszyn
2004 IEE Proceedings - Science Measurement and Technology  
A review of radio frequency microelectromechanical systems (RF MEMS) technology, from the perspective of its enabling technologies (e.g. fabrication, RF micromachined components and actuation mechanisms  ...  It is likely that the switch will continue to be the most important RF MEMS component, with future work investigating its enhanced functionality, subsystem integration and volume production.  ...  With low actuation voltage switches, like the one in Fig. 4 , stiction can be a serious problem.  ... 
doi:10.1049/ip-smt:20040405 fatcat:7betp3scozbezewmiiqlaibcqq

A methodology for fast finite element modeling of electrostatically actuated MEMS

Prasad S. Sumant, Narayana R. Aluru, Andreas C. Cangellaris
2009 International Journal for Numerical Methods in Engineering  
In this paper, a methodology is proposed for expediting the coupled electro-mechanical finite element modeling of electrostatically actuated MEMS.  ...  The proposed methodology is demonstrated through its application to the modeling of four MEMS devices with varying length-to-gap ratios, multiple dielectrics and complicated geometries.  ...  In order to maximize movement while keeping the actuation voltage low, the movable beams are typically made of very thin metal films with high aspect ratios.  ... 
doi:10.1002/nme.2469 fatcat:wogzkei4k5hodjwojwzcg7nwry

Silicon microcontact printing engines

R R A Syms, H Zou, K Choonee, R A Lawes
2009 Journal of Micromechanics and Microengineering  
Complete miniature print engines combining elastically supported print heads with alignment structures that mate with corresponding features on etched substrates to allow mechanical registration are constructed  ...  The impression can be transferred manually or using an in-built mechanism such as electrostatic actuation. 10 mm × 10 mm prototypes are fabricated using microelectromechanical systems technology, using  ...  Acknowledgments The authors are grateful to Dr John Stagg for initial work on process development, Dr Munir Ahmad for assistance with PDMS compositions and Dr Tanzi Besant and Dr David Barnes for performing  ... 
doi:10.1088/0960-1317/19/2/025027 fatcat:5h7z7m3ugralvjrql7uuamlawa

Thick single-crystal silicon MEMS with high-aspect-ratio vertical air gaps

Pejman Monajemi, Farrokh Ayazi, Mary-Ann Maher, Harold D. Stewart
2005 Micromachining and Microfabrication Process Technology X  
This is suitable for applications of micro-gravity accele rometers, low voltage tunable capacitors, and highresolution gyroscopes that require aspect ratios as large as 100:1 to achieve high sensitivity  ...  low-resistivity silicon substrate.  ...  MEMS variable capacitors are prime candidates to replace the conventional solid state varactors, mainly due to their low insertion loss, good isolation, linear characteristic and low power consumption.  ... 
doi:10.1117/12.590750 fatcat:7dtwgpq5trbsjjnrsw6grhoumi
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