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Diamond diffractive optics—recent progress and perspectives

Marcell Kiss, Sichen Mi, Gergely Huszka, Niels Quack
2020 Advanced Optical Technologies  
Among these, diffractive optical elements stand out—with progress in fabrication technologies, micro- and nanofabrication techniques have enabled the creation of gratings and diffractive optical elements  ...  This review collects recent examples of diffractive optical devices in diamond, and highlights the advances in manufacturing of such devices using micro- and nanofabrication techniques, in contrast to  ...  Conclusion This review aims to give an overview of the recent progress and current status in diffractive optical elements in diamond manufactured by micro-and nanofabrication techniques.  ... 
doi:10.1515/aot-2020-0052 fatcat:fhii3utlz5f3hdf2vqqw4vvtma

Diffractive Optics

Pierre Ambs
2004 Optical Engineering: The Journal of SPIE  
The 22 papers from 16 countries published in this special section on diffractive optics reflect the recent trends and progress in DOE applications, fabrications, optical system design and implementations  ...  Diffractive and micro optics have had fast growth in the last 20 years since microlithography technology began to be used for fabrication of optical elements.  ...  The 22 papers from 16 countries published in this special section on diffractive optics reflect the recent trends and progress in DOE applications, fabrications, optical system design and implementations  ... 
doi:10.1117/1.1813443 fatcat:l6yqxkpembg5xgucfqgwl3hkcq

Front Matter: Volume 10275

1994 Glass Integrated Optics and Optical Fiber Devices: A Critical Review  
There has been remarkable progress in optical fiber devices.  ...  There has been remarkable progress in optical fiber devices.  ... 
doi:10.1117/12.2284730 fatcat:u5gomgetxnfkbeu6rnvxu4yt34

Three-dimensional Femtosecond Laser Integration in Glasses

Ya CHENG, Zhizhan XU, Jian XU, Koji SUGIOKA, Katsumi MIDORIKAWA
2008 The Review of Laser Engineering  
In this paper, we will review the 3D femtosecond laser fabrication of the multifunctional micro-components in glasses as well as their integration.  ...  In addition, we will report the latest progress in this active research field, e.g., the fabrication of a tunable microfluidic waveguide, selective surface metallization on dielectrics, and the formation  ...  Recently, progress has been made in integration of 3D photonics and microfluidics for developing optofluidic technology, 3, 4) which would eventually enable enhanced functionality of the LOC devices.  ... 
doi:10.2184/lsj.36.1206 fatcat:aets3u76ebewrldkzl2fi2ltzy

Erbium-doped hybrid waveguide amplifiers with net optical gain on fully industrial 300 mm silicon nitride photonic platform

John Rönn, Jianhao Zhang, Weiwei Zhang, Zhengrui tu, Antti Matikainen, Xavier LE ROUX, Elena Durán-Valdeiglesias, Nathalie Vulliet, Frederic Boeuf, Carlos Alonso Ramos, Harri Lipsanen, Laurent Vivien (+2 others)
2020 Optics Express  
Recently, erbium-doped integrated waveguide devices have been extensively studied as a CMOS-compatible and stable solution for optical amplification and lasing on the silicon photonic platform.  ...  We show net optical gain over sub-cm long waveguide channels that also include grating couplers and mode transition tapers, ultimately demonstrating tremendous progress in developing cost-effective active  ...  Disclosures The authors declare no conflicts of interest.  ... 
doi:10.1364/oe.399257 pmid:32988074 fatcat:kbbciyqlovhjpmhemdzhpoooee

Masks for Extreme Ultraviolet Lithography [chapter]

Pei-yang Yan
2005 Handbook of Photomask Manufacturing Technology  
In this paper the state-of-the-art in ML deposition technology, optical inspection of EUVL mask blank defects and candidate absorber patterning approaches are reviewed.  ...  In extreme ultraviolet lithography (EUVL), the technology specific requirements on the mask are a direct consequence of the utilization of radiation in the spectral region between 10 and 15 nm.  ...  Jeong et a114. describe recent progress in the development of an EW scatterometer for mask blank metrology in these proceedings.  ... 
doi:10.1201/9781420028782.ch11 fatcat:tlc2ji5ocbc5fe2erywlztkzl4

Masks for extreme ultraviolet lithography

Stephen P. Vernon, Patrick A. Kearney, William M. Tong, Shon T. Prisbrey, Cindy C. Larson, Craig E. Moore, Frank J. Weber, Gregory F. Cardinale, Pei-yang Yan, Scott D. Hector, Brian J. Grenon, Frank E. Abboud
1998 18th Annual BACUS Symposium on Photomask Technology and Management  
In this paper the state-of-the-art in ML deposition technology, optical inspection of EUVL mask blank defects and candidate absorber patterning approaches are reviewed.  ...  In extreme ultraviolet lithography (EUVL), the technology specific requirements on the mask are a direct consequence of the utilization of radiation in the spectral region between 10 and 15 nm.  ...  Jeong et a114. describe recent progress in the development of an EW scatterometer for mask blank metrology in these proceedings.  ... 
doi:10.1117/12.332826 fatcat:3o4ilx5vdbhfpldfhlp56mwa4u

Development of Transparent and Flexible Transistor and Analysis of its Electrical and Optical Performances

2019 International Journal of Engineering and Advanced Technology  
The fabricated junctions are tested by studying their operation in ordinal conditions. We judge the quality of junctions and transistor from their optical properties and electrical ones.  ...  Moreover, we analyze evolutions of electrical impedance in function of temperature and optical reflection coefficient.  ...  Finally, this innovation is a concrete exploration of minerals that are a promising treasure of atlas region in Morocco by integrating these elements on fabrication processes of recent technology.  ... 
doi:10.35940/ijeat.a1022.1291s619 fatcat:kgcrhku5yzan7jvtticp26btgm

Three Dimensional VLSI-Scale Interconnects [chapter]

Dennis W. Prather
2000 Lecture Notes in Computer Science  
optical elements (DOEs) for beam routing and fan-out.  ...  To facilitate integration into the current manufacturing infrastructure, our system is monolithically fabricated in the Silicon substrate and preserves scale of integration by using meso-scopic diffractive  ...  Our approach is based on our recent progress in the development of suitable design tools, which enable the design of VLSI-scale DOEs for monolithic integration with active devices.  ... 
doi:10.1007/3-540-45591-4_149 fatcat:xcrofkqg55athfqvibc4or6pfu

Ultra-low-loss polymeric waveguide circuits for optical true-time delays in wideband phased-array antennas

Suning Tang
2000 Optical Engineering: The Journal of SPIE  
Fast photodiode arrays are fabricated and rf signals with frequencies of 10 to 50 GHz are generated through the optical heterodyne technique.  ...  The presented methodologies enable hybrid integration with a reduced cost in optoelectronic packaging and an increased reliability and decreased payload for the next generation of phased-array antennas  ...  Acknowledgments This research is supported by the Ballistic Missile Defense Organization ͑BMDO͒, the Air Force Office of Scientific Research ͑AFOSR͒, the Office of Naval Research ͑ONR͒, the 3M Foundation  ... 
doi:10.1117/1.602409 fatcat:y5fij2e2tzeijcowigth3amhsq

Quantum micro-nano devices fabricated in diamond by femtosecond laser and ion irradiation [article]

Shane M. Eaton, J. P. Hadden, Vibhav Bharadwaj, Jacopo Forneris, Federico Picollo, Federico Bosia, Belen Sotillo, Argyro N. Giakoumaki, Ottavia Jedrkiewicz, Andrea Chiappini, Maurizio Ferrari, Roberto Osellame (+3 others)
2020 arXiv   pre-print
The unique capabilities of both techniques are described, and the most important fabrication results of color center, optical waveguide and microfluidics in diamond are reported, with an emphasis on integrated  ...  In this Report, an overview is provided of ion irradiation and femtosecond laser writing, two promising fabrication methods for diamond based quantum technological devices.  ...  Scanning keV FIB nanofabrication is finding an ever-increasing range of application for integrated photonic structures, thanks to significant progress in ion optics and innovative ion beam sources [64  ... 
arXiv:2004.07460v1 fatcat:r56ajwaunrbnflez6zi5kjijyu

Quantum photonic networks in diamond

Marko Lončar, Andrei Faraon
2013 MRS bulletin  
The drawback of SIL geometry is a more complicated fabrication approach, often based on focused ion beam milling.  ...  While signifi cant progress has been made toward the fabrication of high-quality devices in single crystal diamond, several major challenges remain.  ... 
doi:10.1557/mrs.2013.19 fatcat:thsdfs3ikvdnnfugujhkckh64q

On-chip optical processing

M. Edward Motamedi, Ming C. Wu, Kristofer S. J. Pister, M. Edward Motamedi, Wayne Bailey
1996 Microelectronic Structures and MEMS for Optical Processing II  
Microoptical components, such as diffractive and refractive microlenses, micromirrors, beam splitter and beam combining have recently received considerable attention in the optics R&D centers and finally  ...  We also review the potential of on-chip optical processing and recent achievement of free-space integrated optics and microoptical bench components developed at UCLA, and digital micromirror devices (DMDs  ...  Remarkable progress in sculpting and micromachining added a third dimension to integrated circuits; and as a result, a 3-D microstructure could be fabricated.  ... 
doi:10.1117/12.251259 fatcat:ez4votyhmvfkppqwlwwmcpf26a

ION BEAM MATERIALS ANALYSIS AND MODIFICATIONS AT keV TO MeV ENERGIES AT THE UNIVERSITY OF NORTH TEXAS

BIBHUDUTTA ROUT, MANGAL S. DHOUBHADEL, PRAKASH R. POUDEL, VENKATA C. KUMMARI, WICKRAMAARACHCHIGE J. LAKSHANTHA, JACK E. MANUEL, GYANENDRA BOHARA, SZABOLCS Z. SZILASI, GARY A. GLASS, FLOYD D. MCDANIEL
2014 International Journal of Modern Physics, Conference Series  
The NEC 9SH accelerator was recently installed in the IBMAL and subsequently upgraded with the addition of a capacitive-liner and terminal potential stabilization system to reduce ion energy spread and  ...  therefore improve spatial resolution of the probing ion beam to hundreds of nanometers.  ...  Strzhemechny at Texas Christian University for the PL characterization of the samples shown in Figs  ... 
doi:10.1142/s2010194514601471 fatcat:svmi5jvponbuxc2jozg3rqsc2u

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

Shane M. Eaton, John P. Hadden, Vibhav Bharadwaj, Jacopo Forneris, Federico Picollo, Federico Bosia, Belen Sotillo, Argyro N. Giakoumaki, Ottavia Jedrkiewicz, Andrea Chiappini, Maurizio Ferrari, Roberto Osellame (+3 others)
2019 Advanced Quantum Technologies  
In this Progress Report, an overview is provided of ion irradiation and femtosecond laser writing, two promising fabrication methods for diamond-based quantum technological devices.  ...  The unique capabilities of both techniques are described, and the most important fabrication results of color center, optical waveguide, and microfluidics in diamond are reported, with an emphasis on integrated  ...  " scheme (POR-FESR 2014-2020 program of the European Union)"; "Finanziamento ex-post di progetti di ricerca di Ateneo" funded by the University of Torino with the support of the "Fondazione di San Paolo  ... 
doi:10.1002/qute.201900006 fatcat:pmwzn66ufngnposm4ycoz2rp5q
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